منابع مشابه
Plastic Hermetic Packages for MEMS?
The sealed hermetic package is over 100 years old if we include cathode ray and vacuum tubes. While the package has changed, the idea of making a near-perfect gas-tight enclosure has remained constant. The metal and ceramic full hermetic package may be required for applications that cannot use the non-hermetic plastic package, but is there an intermediate package choice? During the last few yea...
متن کاملPlastic Hermetic Packages for MEMS , MOEMS & Optoelectronic Devices ?
Introduction The full hermetic package for electronics and optoelectronic (OE) devices was first developed in the 1800’s and has served these industries well. The earliest optoelectronic devices, cathode ray tubes (CRT) demonstrated in the late 1800’s, used a sealed glass vacuum enclosure. The Braun Tube, for example, was a scanning CRT display system that used a glass envelope to seal out the ...
متن کاملCoupled Package-Device Modeling for MEMS
Microelectromechanical Systems (MEMS), by their nature as sensors and actuators, require application specific packaging. The package is the near environment of the MEMS device and hence has a direct effect on its thermal behavior, on mechanical effects, and on environmental compatibility and contamination. Therefore, understanding the influence of the packaging on MEMS device performance is cri...
متن کاملMEMS for Optical Functionality
We discuss key features of MEMS technology which enable new functionalities of microphotonic devices, that can by summarized as “arrayability”, i.e. the ability to make massively parallel optical devices in a small form factor, “reconfigurability,” the ability to change optical properties spatially and temporaly, and “nano positioning,” the ability to position micro-scale devices with nanometer...
متن کاملOptical MEMS for telecoms
MEMS are finding an increasing number of applications in sensors, devices, and actuators1,2. MEMS are being applied to a wide range of systems. Progress is dramatic, especially in optical telecommunications3. These applications may be divided roughly into two classes: i) those requiring precise features for optical alignment, and ii) those involving the small moving optical parts necessary for ...
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ژورنال
عنوان ژورنال: Journal of Microelectronics and Electronic Packaging
سال: 2009
ISSN: 1551-4897
DOI: 10.4071/1551-4897-6.1.32